Production environment and equipment
Equipment of GaN SiC deposition

     XiDian University has the process equipment and environment, where we can grow the wide band gap materials and develop devices. We also have many advanced testing and analysis equipments. Level of clean room is 1000, and area of clean room is over 1000.

 

             GaN/SiC clean room                                                                      GaN MOCVD System-120

 

SiC Materials growth CVD System                                                   GaN MOCVD System-320
                                    from EPIGRESS                                                                                                                                


The address of the Keylab.: 2 South Taibai Road, Xi'an,Shaanxi 710071

The telephone number: (029) 88202073 E-mail: pjma@xidian.edu.cn  Technical support:xianjuli