RIE Eheam Evaporator
Xidian University has the process equipment and environment with 3 super-clean labs of the area over 400㎡ each, where we can grow the wide band gap materials and develop devices. We also have a complete set of advanced testing and analysis equipments.
The level-1000 super-clean room of the microelectronic super-clean technological lab, together with material growth, device manufacture and related characterization equipments, forms a complete process line for chemical compound semiconductor materials and devices.
Device and material experimental production line has a clean area over 1000㎡ with the clean level of 1000(some part is of level 100). It can produce 300-600 wafers of 3 inches monthly.
◇ NIKON 17 step-by-step lithography (0.5μm)
◇ MJB3 photolithographer (0.8μm)
◇ PECVD dielectric deposition equipment
◇ RIE Reactive ion etching machine
◇ VPC-1100 electron beam evaporator(4 targets)
◇ ICP-98C plasma etcher